G - Physics – 03 – F
Patent
G - Physics
03
F
G03F 7/20 (2006.01)
Patent
CA 2627688
The present invention provides a clean closed loop fluid transport system and methods for recycling low absorbance liquid alkanes. The alkanes can be advantageously employed as immersion liquids in the production of electronic or integrated optical circuit elements by photolithographic methods employing ultraviolet wavelengths.
La présente invention concerne un dispositif propre de transport de fluide à boucle fermée et des procédés de recyclage d~alcanes liquides de faible absorbance. Les alcanes peuvent être utilisés de manière avantageuse en tant que liquides d~immersion dans la fabrication d~éléments de circuits optiques intégrés ou électroniques par des procédés photolithographiques utilisant des longueurs d~onde ultraviolettes.
Adelman Douglas J.
French Roger Harquail
Lemon Michael Francis
Peng Sheng
Shoe Aaron Lewis
E.i. Du Pont de Nemours And Company
Torys Llp
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