Apparatus for retaining wafers

Details Apparatus for retaining wafers Apparatus for retaining wafers

B - Operations, Transporting

23

B

269/7

B23B 31/20 (2006.01) H01L 21/677 (2006.01) H01L 21/687 (2006.01)

Patent

CA 1320741

-21- Abstract of the Disclosure A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corre- sponding plurality of the holding devices are arranged around the periphery of the disk. A counter- weight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centri- fugal force of the wafer pressing against the fingers as the disk is rotated.

565784

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