Apparatus for sputter coating discs

Details Apparatus for sputter coating discs Apparatus for sputter coating discs

C - Chemistry, Metallurgy

23

C

204/167.3

C23C 14/34 (2006.01) C23C 14/56 (2006.01)

Patent

CA 1292967

ABSTRACT Apparatus for sputter coating a disc comprises an evacuable chamber with a disc entry and exit opening. A disc to be coated is supported at the centre of the disc by support means and drive means move the support means along a disc path between a disc loading position outside the chamber and a disc coating position within the chamber. Inside the chamber are two pivotally mounted cathodes each having coating material to be sputtered applied to a surface thereof. The cathodes are mounted to pivot between the withdrawn position lying clear of the disc path and operating position wherein the cathodes lie one to each side of the disc when this is in the coating position. Means are provided for rotating the support means and thus the disc about the disc centre when in the coating position and during such rotation coating material is sputtered from the cathodes simultaneously onto both sides of the disc.

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