H - Electricity – 05 – H
Patent
H - Electricity
05
H
204/174
H05H 1/42 (2006.01) B01D 53/32 (2006.01) B01D 53/46 (2006.01) B01J 19/08 (2006.01) H01J 37/04 (2006.01)
Patent
CA 2029437
- 1 - Abstract The present invention is directed to a waste gas treating apparatus including a discharge tube comprising a tubular container having a gas introduction opening and a gas leading opening and at least one pair of anodes and cathodes placed within the container, a dc or ac power supply connected to electrodes, and a gas flow passage formed in the discharge tube wherein at least a pair of anodes is provided opposite to each other in the flow passage, at least a pair of cathodes is provided opposite to the anodes in a direction nearly at right angles to the anodes without contacting the anodes in a space including the pair of anodes; a set of electrodes is comprised of said pair of anodes and said pair of cathodes; a part or the whole of said anodes and said cathodes are comprised of a plurality of plates or pillars and they are electro- conductively connected integrally and a device for forming a magnetic field application device forming a dc or ac magnetic field in the opposing direction of the cathodes is fixed to the discharge tube. The waste gas treating apparatus of the present invention is suitable for treating reactive gases discharged from semi-conductor production facilities.
Itatani Ryohei
Matsuda Toshinori
Minoshima Hiroyasu
Miura Akiko
Ooe Takashi
Kirby Eades Gale Baker
Mitsui Toatsu Chemicals Inc.
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