C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
32/25, 204/167.3
C23C 14/56 (2006.01) C23C 14/50 (2006.01) H01L 21/00 (2006.01) H01L 21/687 (2006.01)
Patent
CA 1304573
Abstract Apparatus on the carousel principle for the coating of substrates. In a vacuum chamber (1) is disposed a rotatable substrate holder (6) which has a plurality of substrate pickups in a circular arrangement at equal distances apart. By means of a drive a corresponding number of substrates are transportable on a circular path from an air lock station (8, 9) through at least one coating station (10, 11) to the air lock station. To solve the problem of increasing the throughput of substrates the vacuum chamber (1) has two air lock stations (8, 9) and two coating stations (10, 11) one following the other. The step size of the drive (36) on the one hand, and the angular position of each coating station (10 and 11, respectively) with respect to the air lock station associated with it (8 and 9, respectively) with reference to the axis of rotation of the substrate holder (6) on the other hand, are selected such that one and the same coating station (10 and 11, respectively), through the step-wise movement of a particular substrate pickup (63), is associated in each case with one and the same air lock station (8 and 9, respectively).
576347
Anderle Friedrich
Costescu Dan Lucian
Kempf Stefan
Novak Emmerich
Zejda Jaroslav
Johnson Douglas S. Q.c.
Leybold Aktiengesellschaft
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