Apparatus to clean solid surfaces using a cryogenic aerosol

Details Apparatus to clean solid surfaces using a cryogenic aerosol Apparatus to clean solid surfaces using a cryogenic aerosol

B - Operations, Transporting

08

B

B08B 7/00 (2006.01) B08B 11/00 (2006.01) B24C 3/12 (2006.01) B24C 3/32 (2006.01) B24C 9/00 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2093750

The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.

Cette invention concerne un appareil servant à nettoyer les surfaces pleines de semiconducteurs au moyen d'un jet de gaz cryogène, de l'argon par exemple, dirigé sur lesdites surfaces pour en déloger les impuretés. L'appareil comprend une buse appropriée dans un logement à atmosphère ultrapure comportant des conduits d'amenée et d'évacuation de gaz de balayage et, à l'intérieur, un plateau mobile servant au déplacement contrôlé du semiconducteur sur une voie située sous le jet de cryogène débité par la buse ci-dessus.

Affiliated with

Also associated with

Rating

Apparatus to clean solid surfaces using a cryogenic aerosol does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus to clean solid surfaces using a cryogenic aerosol, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus to clean solid surfaces using a cryogenic aerosol will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-2074229