Apparatuses and methods for cryogenic cooling in thermal...

Details Apparatuses and methods for cryogenic cooling in thermal... Apparatuses and methods for cryogenic cooling in thermal...

C - Chemistry, Metallurgy

23

C

C23C 14/04 (2006.01) C23C 16/04 (2006.01)

Patent

CA 2681875

Apparatuses and methods for preventing the degradation of one or more mask materials during a thermal surface treatment process of a substrate having the steps of mounting at least one mask comprising one or more mask materials onto a substrate; thermally surface treating a surface of the substrate which increases the temperature of the substrate; and cooling the one or more mask materials with cryogenic fluid from at least one cooling means directed at the substrate.

L'invention se rapporte à des appareils et des procédés destinés à prévenir la dégradation d'une ou plusieurs matières de masque au cours du procédé de traitement thermique de surface d'un substrat, ce procédé présentant les étapes consistant à mettre en place au moins un masque comprenant une ou plusieurs matières de masque sur un substrat ; traiter en surface thermiquement une surface du substrat qui augmente la température du substrat ; et refroidir la ou les matières de masque avec un fluide cryogénique provenant d'au moins un moyen de refroidissement dirigé sur le substrat.

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