Arc coating of refractory metal compounds

Details Arc coating of refractory metal compounds Arc coating of refractory metal compounds

C - Chemistry, Metallurgy

23

C

32/24, 117/74

C23C 14/22 (2006.01) C23C 14/00 (2006.01) C23C 14/32 (2006.01) H01J 37/32 (2006.01)

Patent

CA 1272910

ARC COATING OF REFRACTORY METAL COMPOUNDS WITH COMPOSITE TARGETS ABSTRACT OF THE DISCLOSURE A process for arc coating alloy nitride films on objects using a cathode or target having the two metals from which the alloy is to be formed and a steered arc that is controlled in its path across the target along a controlled arc trajectory to provide a controlled coating composition with reproducible results.

533801

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