Arc source macroparticle filter

Details Arc source macroparticle filter Arc source macroparticle filter

H - Electricity

01

J

H01J 33/00 (2006.01) C23C 14/02 (2006.01) C23C 14/08 (2006.01) C23C 14/16 (2006.01) C23C 14/22 (2006.01) C23C 14/32 (2006.01) H01J 37/04 (2006.01) H01J 37/08 (2006.01) H01J 37/317 (2006.01) H01J 37/32 (2006.01) H01J 37/36 (2006.01) H05H 1/10 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2106598

2106598 9216959 PCTABS00016 An arc source macroparticle filter (1) includes a circular cathode (2) for emitting particles and an extended cylindrical anode (3) adjacent to and co-axial with the cathode for accelerating the emitted particles. Torroids (4) generate a magnetic field to define a continuous non-linear plasma duct (5) for directing charged particles and separating therefrom undesirable larger particles. The duct is minimally non-linear to permit high rates of charged particle transmission. Arc source filter (1) allows heating and/or the deposition of a variety of surface coatings to a workpiece (8). Also claimed is a method of producing vanadium dioxide.

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