G - Physics – 01 – L
Patent
G - Physics
01
L
G01L 9/04 (2006.01) G01L 9/00 (2006.01)
Patent
CA 2184213
A pressure sensor containing a sensing element having a silicon substrate (15) on which strain gauges (16) are fixed and being housed in a sensor body (10). The sensing element is mounted on a base (17) connected to a metallic portion (10b) of the sensor body (10) by the intermediary of an element (18, 28) which is elastically deformable and adapted to compensate for differences in thermal expansion between the base (17) and sensing element with respect to the sensor body (10). The sensor further comprises a stress taking up piece (21) capable of taking up stresses generated by the pressure to be measured on the assembly constituted by the base (17) and the sensing element. This sensor is thus adapted for use at high pressures and in an environment at high, and variable temperature.
Mccarthy Tetrault Llp
Societe Europeenne de Propulsion
LandOfFree
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