Arrangement for coupling in of microwave energy

Details Arrangement for coupling in of microwave energy Arrangement for coupling in of microwave energy

C - Chemistry, Metallurgy

23

C

C23C 16/50 (2006.01) H01J 37/32 (2006.01) H01P 5/02 (2006.01) H01P 5/08 (2006.01) H01P 5/103 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2073391

A B S T R A C T An arrangement is disclosed for coupling in of microwave energy into a reaction chamber (14), exhibiting electrically stable tuning and being, within limits, tolerant against changes in critical dimensions and power fluctuations. The coaxial line (4) between the hollow waveguide (2) and the reaction chamber (14) is of such a structure that it forms, at least together with the reaction chamber (14), a lossy resonator for the microwave frequency employed. The coaxial line (4) can comprise an absorber (10) or, alternatively, can be made of a poorly conductive material. There is also the possibility of downgrading the quality of the resonator by leaving an annular gap (15) between the metal plate (13) and the outer con- ductor section (6). (Figure 1)

Affiliated with

Also associated with

Rating

Arrangement for coupling in of microwave energy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Arrangement for coupling in of microwave energy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Arrangement for coupling in of microwave energy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1881156