Articles for semiconductor industry

Details Articles for semiconductor industry Articles for semiconductor industry

H - Electricity

01

L

H01L 21/77 (2006.01) H01L 23/14 (2006.01)

Patent

CA 2214192

Articles for semiconductor industry Articles for the application in the semiconductor industry consist essentially of modified polytetrafluoroethylene. Such articles comprise carriers for wafers or flat panel displays or etch basins for wafer carriers. Such articles can be obtained by molding modified polytetrafluoroethylene powder and subsequent sintering of the molded billet or by ramextrusion, if necessary followed by maching step and optionally a post treatment by a polishing step.

Articles destinés à l'industrie des semi-conducteurs, composés essentiellement de polytétrafluoréthylène modifié. Ces articles comprennent des porte-tranches, des supports de panneau solaire plan ou des bassins de nettoyage pour des porte-tranches. La méthode de fabrication consiste à mouler de la poudre de polytétrafluoréthylène modifié et ensuite à fritter la billette moulée ou à procéder à l'extrudo-sintérisation, suivie si nécessaire, d'une étape d'usinage et, facultativement, d'un post-traitement de polissage.

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