Assembly and method to extend useful life of sputtering targets

Details Assembly and method to extend useful life of sputtering targets Assembly and method to extend useful life of sputtering targets

H - Electricity

01

J

204/167.5

H01J 37/34 (2006.01)

Patent

CA 1118715

P-309 ASSEMBLY AND METHOD TO EXTEND USEFUL LIFE OF SPUTTERING TARGETS ABSTRACT The present invention relates to a consumable metal cathode assembly and a method of fabricating such an assembly from the partially consumed metal components of a cathode assembly, and which components have been eroded through the impact of a contained ionized gas.

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