Associated dual interferometric measurement apparatus and...

Details Associated dual interferometric measurement apparatus and... Associated dual interferometric measurement apparatus and...

G - Physics

01

B

G01B 11/02 (2006.01) G01B 9/02 (2006.01) G01B 11/14 (2006.01) G01N 21/45 (2006.01)

Patent

CA 2169506

The present invention relates to an apparatus and method for measuring physical properties of an object, such as thickness, group index of refraction, and distance to a surface. The apparatus includes a non- coherent light interferometer and a coherent light interferometer in association so as to share a variable optical path delay element. Thickness measurements can be made, for example, of solids, liquids, liquids moving along a horizontal plane, or liquids flowing down a plane. Thickness measurements of multiple layers can be made.

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