Atmospheric pressure non-thermal plasma device to clean and...

C - Chemistry – Metallurgy – 23 – F

Patent

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Details

C23F 1/00 (2006.01) B23K 9/00 (2006.01) B23K 9/02 (2006.01) H01L 21/306 (2006.01)

Patent

CA 2528194

The present invention relates to methods and apparatuses for the use of atmospheric pressure non-thermal plasma to clean and sterilize the surfaces of liquid handling devices.

L'invention concerne des procédés et des appareils permettant d'utiliser un plasma non thermique à pression atmosphérique pour nettoyer et stériliser les surfaces de dispositifs de manipulation de liquides.

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