H - Electricity – 05 – K
Patent
H - Electricity
05
K
356/132
H05K 3/00 (2006.01) G05B 19/418 (2006.01)
Patent
CA 1058329
AUTOMATED INTEGRATED CIRCUIT MANUFACTURING SYSTEM ABSTRACT A computer controlled manufacturing system for fabricating semiconductor wafers into large scale integrated circuit devices and wherein each semicon- ductor wafer has scored, or recorded thereon, distinct identifying indicia, such as a machine readable serial number. A plurality of concurrently oper- able semiconductor wafer processing stations are independently computer con- trolled. Each of the stations performing at least one discrete fabrication step. A digital computer system operable under stored program control means, said computer system being interconnected with and controlling said processing stations, random access storage means, reading means and conveying means, whereby under computer control selected ones of said semiconductor wafers which are randomly stored in said random access storage means may be selected and fabricated into first part number large scale integrated circuit devices, and selected second ones of said semiconductor wafers randomly stored in said random access storage means may be selected and fabricated into second part number large scale integrated circuit devices, where said first and second part number devices are not identical.
272816
Caccoma George A.
Castrucci Paul P.
Druschel William O.
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