G - Physics – 01 – R
Patent
G - Physics
01
R
G01R 31/303 (2006.01) G01N 23/225 (2006.01) G01R 31/307 (2006.01) H01J 37/28 (2006.01) H01J 49/26 (2006.01)
Patent
CA 2260436
A method of analysing integrated circuits is provided. The method provides for scanning the integrated circuit with a beam in order to image an upper layer of the integrated circuit and performing chemical analysis on the upper layer of the integrated circuit. The chemical information and the imaging information are correlated and used to reverse engineer the integrated circuit.
Breton Pierrette
Elvidge Julia
Haythornthwaite Ray
James Dick
Phaneuf Michael
Blake Cassels & Graydon Llp
Chipworks
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