Automatic mask alignment

Details Automatic mask alignment Automatic mask alignment

H - Electricity

01

L

356/194, 356/22

H01L 21/68 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1150418

ABSTRACT A target for use in aligning masks used in producing microcircuits which is of a size that can be printed or a microcircuit chip without interfering with the lines thereon, consisting only of lines vertically or diagonally disposed with respect to the image transducer is disclosed. Also disclosed is an automatic system for aligning such targets.

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