Automatic tip approach method and apparatus for scanning...

Details Automatic tip approach method and apparatus for scanning... Automatic tip approach method and apparatus for scanning...

G - Physics

01

Q

G01Q 10/00 (2010.01) G01Q 10/04 (2010.01) G01Q 10/06 (2010.01) G01B 7/28 (2006.01) G12B 21/22 (2006.01) G12B 21/02 (2006.01)

Patent

CA 2098040

A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.

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