Automatically adjustable electron microscope

Details Automatically adjustable electron microscope Automatically adjustable electron microscope

H - Electricity

01

J

358/10

H01J 37/21 (2006.01) H01J 37/153 (2006.01)

Patent

CA 1225756

PHN 10 878 11 26-11-1984 ABSTRACT: "Automatically adjustable electron microscope." In order to find criteria for the adjustment of an optimum focus, lens correction, specimen shift and the like, measurements are performed by means of a beam wobbler and the corresponding generation of a variable F(s) = .SIGMA.¦(Xi - Yi+s)¦ ? in order to determine that s-value for which F(s) is a minimum. Using This image shift value is then used to make a correction preferably automatically.

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