Bandgap tuning of semiconductor well structure

H - Electricity – 01 – L

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H01L 21/265 (2006.01) H01L 21/18 (2006.01) H01L 21/266 (2006.01) H01L 21/477 (2006.01) H01S 5/34 (2006.01) H01S 5/026 (2006.01) H01S 5/16 (2006.01) H01S 5/20 (2006.01) H01S 5/40 (2006.01) H01L 33/00 (2006.01)

Patent

CA 2212751

In a method of bandgap tuning of a quantum well heterostructure wherein ions are implanted in the heterostructure by ion implantation, the ions are implanted so that different regions are implanted in such a way as to create different concentrations of defects. This provides varying bandgap energies to various areas of the heterostructure during a subsequent thermal treatment, which removes residual defects and initiates intermixing in the quantum well region to result in a structure having a selectively shifted bandgap.

Procédé d'accord d'une hétérostructure à puits quantique dans laquelle des ions sont implantés dans ladite hétérostructure par implantation ionique, selon lequel les ions sont implantés de manière à ce que différentes régions soient implantées afin de créer différentes concentrations de défauts. Cela produit des énergies de bande interdite variables pour les différentes zones de l'hétérostructure pendant un traitement thermique ultérieur, ce qui élimine les défauts résiduels et provoque un mélange dans la région du puits quantique permettant d'obtenir une structure à bande interdite sélectivement décalée.

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