Bath and process for the electrodeposition of ruthenium

Details Bath and process for the electrodeposition of ruthenium Bath and process for the electrodeposition of ruthenium

C - Chemistry, Metallurgy

25

D

204/29.5

C25D 3/52 (2006.01) C25D 3/50 (2006.01) C25D 3/56 (2006.01)

Patent

CA 1195948

ABSTRACT OF THE DISCLOSURE Improved baths for the electrodeposition of ruthenium metal on various substrates. The ruthenium metal baths are formulated with a complex of ruthenium metal and sulphamic acid wherein the molar ratio is one mole of ruthenium metal and from about 4 to 10 moles of sulphamic acid. For most purposes, certain selective metals are also present in the baths, which are maintained at a pH ranging from about 1.0 to 2.2. The process for utilizing said baths to plate sub- strates with essentially pure ruthenium metal is also described and claimed.

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