H - Electricity – 01 – S
Patent
H - Electricity
01
S
H01S 3/02 (2006.01) B23K 26/42 (2006.01) G02B 26/04 (2006.01) H01S 3/00 (2006.01)
Patent
CA 2183016
A shutter mechanism having a slide element coupled to a support base by a plurality of roller bearings journaled between opposing pairs of guide rods is disclosed. The slide element and support base have corresponding beam apertures in alignment when the shutter is in its open position. Angularly mounted on the slide, adjacent to the slide's beam aperture, is a UV reflective mirror. when the shutter is commended to close, an actuator forces the slide and support base apertures out of alignment, while simultaneously positioning the UV reflective mirror into the position previouslyoccupied by the slide's aperture. A laser beam, previously being transmitted through the aligned apertures, will be reflected by the mirror to a beam stop as a diagnostic instrument mounted on the support base.
de Ruyter Anthony John
Means David William
Cymer Inc.
Cymer Laser Technologies
Fetherstonhaugh & Co.
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