Beam position correction device

Details Beam position correction device Beam position correction device

B - Operations, Transporting

23

K

327/6

B23K 15/00 (2006.01) H01J 37/304 (2006.01)

Patent

CA 1285621

ABSTRACT OF THE DISCLOSURE A method and apparatus for correcting the undeflected resting position of an electron beam which has been displaced from its previous resting position because of physical or positional changes in elements of the electron gun which is generating the electron beam. The elec- tron beam is directed towards a detector which determines the direction and amplitude of the deviation along mutually perpendicular axes of the point of impingement of the electron beam from a given reference point. The signals generated by the detector, in cooperation with a computer- controlled deflection system of the electron gun, cause the beam to be displaced in a series of iterative steps to the reference point. The distance and direction of the beam from its resting position to the reference point is maintained in the memory of the computer. .

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