G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 27/00 (2006.01) B01L 3/00 (2006.01) B81B 3/00 (2006.01) G01N 5/00 (2006.01)
Patent
CA 2445285
The invention concerns a biosensor matrix comprising a substrate made of semiconductor material. It has a planar main surface (4) and cavities (8), arranged from the surface (10) opposite said planar surface (4), defining between the base (9) of said cavities and the main planar surface (4) deformable structures (40) which include at least a piezoresistive or piezoelectric element (44). The method for making such a matrix uses manufacturing techniques adapted to microtechnologies and nanotechnologies, preferably with a localised pre-amorphisation of the surface of the substrate prior to implantation of the piezoresistive elements (44), which is followed by annealing.
L'invention concerne une matrice de biocapteurs comprenant un substrat en matériau semi-conducteur. Elle présente une surface principale plane (4) ainsi que des cavités (8), ménagées à partir d'une surface (10) opposée à ladite surface plane (4), définissant entre le fond (9) desdites cavités et la surface principale plane (4) des structures déformables (40) qui comportent au moins un élément sensible piézorésistif (44) ou piézoélectrique. Le procédé de fabrication met en oeuvre des techniques de fabrication propres aux micro et nanotechnoloqies, avec préférentiellement une préamorphisation localisée de la surface du substrat avant implantation des éléments piézorésistifs (44), laquelle est suivie d'un recuit.
Belier Benoit
Bergaud Christian
Cocheteau Emeline
Martinez Augustin
Nicu Liviu
Centre National de La Recherche Scientifique
Robic
LandOfFree
Biosensor matrix and method for making same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Biosensor matrix and method for making same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Biosensor matrix and method for making same will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1586335