Bipolar power transistor and manufacturing method

H - Electricity – 01 – L

Patent

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Details

H01L 29/732 (2006.01) H01L 21/331 (2006.01) H01L 23/66 (2006.01) H01L 29/06 (2006.01)

Patent

CA 2294806

The present invention relates to a vertical bipolar power transistor primarily intended for radio frequency applications and to a method for manufacturing said bipolar power transistor. The power transistor comprises a substrate (13), a collector layer (15) of a first conductivity type on the substrate, a base (19) of a second conductivity type electrically connected to the collector layer, an emitter (21) of said first conductivity type electrically connected to the base, said base and said emitter each being electrically connected to a metallic interconnecting layer (31, 33), said interconnecting layers (31, 33) being at least in parts separated from the collector layer (15) by an insulation oxide (17). According to the invention the power transistor substantially comprises a field shield (25) electrically connected to the emitter, and located between the metallic interconnecting layer of the base and the insulation oxide.

Cette invention, qui a trait à un transistor de puissance bipolaire vertical ayant principalement pour objet des applications relevant du domaine des fréquences radioélectriques, porte également sur le procédé permettant de le fabriquer. Ce transistor de puissance comporte un substrat (13), une couche collecteur (15) sur le substrat, d'un premier type de conductivité, une base (19), d'un second type de conductivité, connectée électriquement à la couche collecteur, un émetteur (21), du premier type de conductivité, connecté électriquement à la base, laquelle base et lequel émetteur étant, chacun, connectés électriquement à une couche métallique d'interconnexion (31, 33), lesquelles couches d'interconnexion (31, 33) étant au moins partiellement séparées de la couche collecteur (15) par un oxyde isolant (17). Conformément à cette invention, le transistor de puissance est essentiellement constitué d'un blindage de champ (25) connecté électriquement à l'émetteur et placé entre la couche métallique d'interconnexion de la base et l'oxyde isolant.

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