G - Physics – 02 – B
Patent
G - Physics
02
B
148/17, 88/0.1
G02B 27/44 (2006.01) G02B 5/18 (2006.01) H01L 21/306 (2006.01)
Patent
CA 1113752
Abstract of the Disclosure In a diffraction grating made of a single crystalline silicon substrate, one major plane thereof is provided with a plurality of asymmetric triangular grooves, each having a wall inclined by an angle .theta. with respect to the major surface so as to satisfy an equation Image where .theta. represents the blaze angle, P the pitch of the groove, .lambda.B the blazing wavelength, and m the order of diffraction. The walls of each groove receiving incident light is covered with a metal coat. The diffraction grating is prepared by using a {hk?} plane (where h = k) inclined by .theta. with respect to the {111} plane of the single crystalline silicon as a major surface, and then anisotropic-etching the major surface through an etching mask having stripes having sufficiently smaller width than the grating constant. Preferably, following the anisotropic etch- ing, isotropic etching is made for the major surface.
331934
Fujii Yohji
Minowa Junichiro
Macrae & Co.
Nippon Telegraph And Telephone Public Corporation
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