Blazed micro-mechanical light modulator and array thereof

G - Physics – 02 – B

Patent

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Details

G02B 26/08 (2006.01) G02B 5/18 (2006.01)

Patent

CA 2352729

A light valve of deformable grating type and a method for light modulation using the light valves is provided. The light valve of deformable grating type, includes at least three beams, one beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impeaching light beam, a first electrode and a second electrode, the electrodes transmitting electrostatic force to at least the deformable beams of the at least three beams. The beam of a substantially fixed-position may be deformable by electrostatic force.

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