Boat for wafer processing

Details Boat for wafer processing Boat for wafer processing

H - Electricity

01

L

356/195

H01L 21/68 (2006.01) C30B 25/12 (2006.01) C30B 31/14 (2006.01)

Patent

CA 1143074

- 13 - Abstract A boat for use in wafer processing technology such as associated with semiconductor wafers. The boat consists of a relatively flat bottom plate (20) having a plurality of substantially parallel V-cut notches (37) therein on which the bottom of the wafer (11) rests and two parallel side rails (38,39) disposed above and on either side of the flat bottom plate (20) for holding the sides of the wafer (11). The two side rails (38,39) include a plurality of opposed U-shaped notches (40) cut in parallel along the inner surface of the side rails (38,39) for movably securing the opposite side edges of the wafer placed in the boat, each pair of opposed U-shaped notches (40) being offset with respect to a V-cut notch (37) operatively associated therewith.

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