Bore-sighted step-and-repeat projection alignment and...

Details Bore-sighted step-and-repeat projection alignment and... Bore-sighted step-and-repeat projection alignment and...

G - Physics

03

B

356/194, 88/94,

G03B 27/32 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1206030

Abstract A projection lens and a source of illumination and exposure light are employed for projecting an image of a reticle onto a first reference mark or a semiconductive wafer, both of which are movably supported in the image plane of the projection lens. Optical apparatus, including a source of nonexposure light, is provided and is operable with the projection lens for imaging a second adjustable reference mark onto the first reference mark or the semi- conductive wafer to facilitate use of the projection lens in aligning a semiconductive wafer covered with a photoresist opaque to exposure light. Additional optical apparatus, including an objective lens unit and an imaging lens, may be provided for imaging light from the source of illumination and exposure light at the reticle and for reimaging reflected light from the semiconductive wafer at the objective lens unit.

430695

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