C - Chemistry – Metallurgy – 04 – B
Patent
C - Chemistry, Metallurgy
04
B
32/23, 117/81
C04B 35/583 (2006.01) C23C 14/24 (2006.01) C23C 16/01 (2006.01)
Patent
CA 1073659
ABSTRACT OF THE DISCLOSURE A boron nitride crucible, suitable for the vaporiza- tion of aluminum, having a multi-walled structure comprising an outer wall and a thinner inner wall weakly bonded to the thicker outer wall. Because of this structure, the crucible is considerably more flexible than conventional single-walled crucibles and exhibits substantially improved thermal cycling characteristics and longer life. The cru- cible is produced by depositing pyrolytic boron nitride upon a mandrel having the shape of the desired crucible at a temperature of from about 1850°C. to about 2100°C. until a first layer of boron nitride of suitable thickness has been produced, interrupting the deposition of boron nitride upon the mandrel and lowering the temperature to below 1750°C., and then depositing additional boron nitride upon the mandrel at a temperature of from about 1850°C. to about 2100°C. to produce a second outer layer of boron nitride having a thickness greater than that of the inner layer.
243925
Na
Union Carbide Corporation
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