Broad band optical reduction system using matched multiple...

Details Broad band optical reduction system using matched multiple... Broad band optical reduction system using matched multiple...

G - Physics

02

B

G02B 17/08 (2006.01) G02B 13/14 (2006.01) G02B 27/28 (2006.01) G03F 7/20 (2006.01) H01L 21/027 (2006.01)

Patent

CA 2088902

SVG-4000 BROAD BAND OPTICAL REDUCTION SYSTEM USING MATCHED MULTIPLE REFRACTIVE ELEMENT MATERIALS Abstract of the Disclosure A broad band catadioptric optical reduction system using refractive elements made of different types of glass matched for color correction over a broad band width. A combination of fused silica and crown glass is used. An aspheric mirror is used for improved aberration correction. The optical system is adapted for use in lithography for semiconductor manufacturing in the I-line and is capable of 0.5 micron resolution at a wavelength of 365 nanometers.

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