Bubbler cylinder device

Details Bubbler cylinder device Bubbler cylinder device

C - Chemistry, Metallurgy

23

C

32/24, 148/2.1

C23C 16/00 (2006.01) C23C 16/448 (2006.01) C23C 16/54 (2006.01) C30B 25/14 (2006.01) C30B 31/16 (2006.01) F17C 13/04 (2006.01)

Patent

CA 1286494

BUBBLER CYLINDER DEVICE ABSTRACT OF THE DISCLOSURE A cylinder assembly which may incorporate a dip tube when used, for example, as a vapor transfer device of electronic grade organometallic liquids to a deposition system but can also be used for storing and dispensing liquids and gases. In case of vapor transfer, the device preferably includes one self-closable filling port inlet, one gas inlet valve and one outlet vapor valve. The dip tube extends downwardly into a cylindrical container.

515065

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