Bump structure and method for bonding to a semi-conductor...

H - Electricity – 01 – L

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H01L 23/485 (2006.01) H01L 21/603 (2006.01) H01L 23/498 (2006.01)

Patent

CA 2075462

A bump structure for bonding leads to a semi-conductor, in which the bump has a thin lower portion which overlaps and seals the edges of the passivation layer, and a thicker upper or stem portion of smaller lateral dimensions to fit within the margins of the opening in the passivation layer. Thus, during bonding, downward compressive forces are applied primarily through the bump stem directly to the metal termination pad beneath the bump, and very little force is applied to the edges of the passivation layer. This reduces the likelihood of passivation layer cracking, increasing device reliability. Because the bump stem is formed within the margins of the passivation layer opening, it has a flat top, resulting in better lead bonding.

Plot de contact permettant de relier des conducteurs à un semiconducteur. Le plot est constitué d'une partie inférieure mince qui recouvre et ferme les bords de la couche de passivation et d'une partie supérieure ou tige plus épaisse et de petites dimensions latérales, ce qui lui permet de se placer à l'intérieur des marges de l'ouverture dans la couche de passivation. Ainsi, pendant la liaison, des forces de compression descendantes sont appliquées principalement par l'entremise de la tige du plot directement à la plaquette d'extrémité métallique située sous le plot, et très peu de pression est appliquée aux bords de la couche de passivation. Les risques que cette dernière ne craque sont ainsi réduits, ce qui accroît la fiabilité du dispositif. Étant donné que la tige du plot est formée à l'intérieur des marges de l'ouverture de la couche de passivation, elle présente une surface supérieure plate, ce qui se traduit par une meilleure connexion des conducteurs.

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