Calibration for ultra high purity gas analysis

Details Calibration for ultra high purity gas analysis Calibration for ultra high purity gas analysis

G - Physics

12

B

G12B 13/00 (2006.01) B01F 3/02 (2006.01) G01N 33/00 (2006.01) H01J 49/02 (2006.01)

Patent

CA 2076174

A calibration device is provided for rapidly delivering ultra high purity calibration gas mixtures, and sample gas, to a gas analyzer at elevated temperature conditions. Steady flow rates are desirably provided to the highly sensitive analyzer.

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