H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/187
H01L 21/02 (2006.01) F16K 27/04 (2006.01)
Patent
CA 1216079
ABSTRACT The present structure includes a furnacing chamber for firing semi-conductor elements and a cantilever supported means for carrying a boat loaded with elements to be fired into the firing zone. It provides a simplified furnacing structure that minimizes the possibility of there being any exposure of the wafers being fired to imperceptible particulate impurities that might possibly be residing in the furnacing chamber.
451194
Gowling Lafleur Henderson Llp
Norton Company
LandOfFree
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