Cantilever type displacement element, and scanning tunneling...

Details Cantilever type displacement element, and scanning tunneling... Cantilever type displacement element, and scanning tunneling...

H - Electricity

01

L

H01L 41/09 (2006.01) G11B 9/00 (2006.01) H01J 37/28 (2006.01)

Patent

CA 2070946

A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb- shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.

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