G - Physics – 11 – B
Patent
G - Physics
11
B
G11B 9/00 (2006.01)
Patent
CA 2052882
A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided a shielding electrode for electrically isolating the probe and the drawing electrode from the driving electrodes.
L'invention est un cantilever bimorphe constitué d'un matériau piézoélectrique monté entre des électrodes d'attaque servant à remuer le cantilever, d'une sonde formée sur ce dernier et d'une électrode d'évacuation construite sur la surface de la sonde, avec une électrode de blindage servant à isoler la sonde et l'électrode d'évacuation des électrodes d'attaque.
Hatanaka Katsunori
Hirai Yutaka
Kasanuki Yuji
Kawase Toshimitsu
Miyazaki Toshihiko
Canon Kabushiki Kaisha
Ridout & Maybee Llp
LandOfFree
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