Capacitive absolute pressure sensor and method

Details Capacitive absolute pressure sensor and method Capacitive absolute pressure sensor and method

G - Physics

01

L

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2205169

A capacitive absolute pressure sensor (10) includes a substrate (14) having an electrode (24) deposited thereon and a diaphragm assembly (12) disposed on the substrate (14). As pressure increases, the diaphragm (16) deflects, touches the electrode (24) (in the touch mode), and changes the capacitance of the sensor (10). The changed capacitance is sensed to thus sense pressure changes. A burried feedthrough is used to sense the change in a capacitance in a chamber (34) under the diaphragm (16) and thus determine the pressure sensed. A vacuum in the chamber (34) is maintained by proper selection of a thickness of a sensing electrode and an insulating layer (32), exposition thereof to a thermal cycle, and the hermetic bonding of the diaphragm assembly (12) to the substrate (14).

L'invention concerne un capteur capacitif de pression absolue (10), qui comprend un substrat (14) à la surface duquel se trouvent une électrode (24) et un ensemble membrane (12). A mesure que la pression augmente, la membrane (16) se déforme, touche l'électrode (24) (en mode tactile), et fait varier la capacité du capteur (10). La détection de cette variation de capacité permet de déceler les variations de pression. Une traversée enterrée est utilisée pour détecter les variations d'une capacité dans un compartiment (34) situé sous la membrane (16), ce qui permet de déterminer la pression captée. On maintient un vide dans le compartiment (34) en choisissant l'épaisseur appropriée pour l'électrode de mesure et la couche isolante (32), qui est exposée à un cycle thermique, et en liant de manière hermétique l'ensemble membrane (12) au substrat (14).

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