Capacitive accelerometer with hinges on top and bottom surface

Details Capacitive accelerometer with hinges on top and bottom surface Capacitive accelerometer with hinges on top and bottom surface

G - Physics

01

P

73/42

G01P 15/00 (2006.01) G01P 1/00 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01)

Patent

CA 2009490

Abstract of the Disclosure Capacitive Accelerometer with Hinges on Top and Bottom Surface A micromachined three-plate capacitive accslerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration. R-3320hsed - 19 -

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