Capacitive accelerometer with mid-plane proof mass

Details Capacitive accelerometer with mid-plane proof mass Capacitive accelerometer with mid-plane proof mass

G - Physics

01

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73/42

G01P 15/00 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01)

Patent

CA 2009494

Abstract of the Disclosure Capacitive Accelerometer with Mid-Plane Proof Mass A micromachined three-plate capacitive accelerometer incorporates a "sandwich" proof mass formed from two layers that are boron-doped to define hinges attached essentially to the mldplane of the proof mass by being placed abutting a bonding interface region at the midplane. R-3325hs-ed - 15 -

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