Capacitive accelerometer with separable damping and sensitivity

Details Capacitive accelerometer with separable damping and sensitivity Capacitive accelerometer with separable damping and sensitivity

G - Physics

01

P

73/42

G01P 15/00 (2006.01) G01P 1/00 (2006.01) G01P 15/08 (2006.01) G01P 15/125 (2006.01)

Patent

CA 2009489

Abstract of the Disclosure Capacitive Accelerometer With Separable Damping and Sensitivity A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration. R-3138hsgc - 21 -

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