Capacitive discharge plasma ion source

Details Capacitive discharge plasma ion source Capacitive discharge plasma ion source

H - Electricity

01

J

H01J 27/00 (2006.01) H01J 49/10 (2006.01) H01S 3/22 (2006.01) H05B 31/22 (2006.01) H05H 1/24 (2006.01) H05H 1/46 (2006.01) H01S 3/223 (2006.01)

Patent

CA 2456629

In a system (10) for chemical analysis, an RF-driven plasma ionization device (11) including a pair of spaced-apart and plasma-isolated electrodes (14, 16), the electrodes (14, 16) are connected to a power source (22) wherein the electrodes (14, 16) act as plates of a capacitor of a resonant circuit (22c), the gas (S) electrically discharges and creates a plasma of both positive and negative ions, and the voltage is applied as a continuous alternating waveform or as a series of pulses, such as a packet waveform.

Dans un système (10) d'analyse chimique, un dispositif (11) d'ionisation plasmatique à commande d'énergie radiofréquence comportant une paire d'électrodes (14, 16) espacées et d'isolation plasmatique, les électrodes (14, 16) sont reliées à une source (22) d'énergie dans lequel les électrodes (14, 16) fonctionnent en tant que plaques de condensateur d'un circuit résonant (22c), le gaz (S) effectue une décharge électrique et génère un plasma d'ions positifs et négatifs, et la tension est appliquée en forme d'onde alternée ou en série d'impulsions, telle qu'une forme d'onde en rafales.

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