Capacitive humidity sensor and method for the manufacture of...

Details Capacitive humidity sensor and method for the manufacture of... Capacitive humidity sensor and method for the manufacture of...

G - Physics

01

N

356/25, 73/71, 3

G01N 27/22 (2006.01)

Patent

CA 1202196

ABSTRACT The present invention is concerned with a capacitive humidity sensor and a method for the manu- facture of same. The sensor comprises a substrate, first and second bottom electrodes arranged close to each other on the substrate, and an active layer, which fills the area between the first and the second bottom electrodes on the substrate and extends to above the top face of the second electrode. According to the invention, the sensor further comprises a plurality of conductive, beam-shaped structures placed side-by- side, connected to the first electrode, and having an upwardly widening cross-section, the structures limit- ing portions of the active layer between themselves from two sides such that a narrow slot is provided between the top faces of the structures. Owing to its construction, the sensor of the invention is not sensitive to touching.

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