Capacitive position transducer

G - Physics – 01 – B

Patent

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Details

340/135.2

G01B 7/30 (2006.01) G01B 7/14 (2006.01) G08C 19/10 (2006.01) H03M 1/64 (2006.01)

Patent

CA 1041630

ABSTRACT OF THE DISCLOSURE A rotary embodiment and two linear embodiments of a pre- cision, high gain, electrostatic position measuring transducer are disclosed. The transducer has a plurality of measurement cycles and comprises two relatively movable elements, each having a surface in spaced opposition to a surface of the other element. The first element has a pattern of uniformly spaced interdigitated electrodes on its surface. The second element has another pattern of uniformly spaced interdigitated electrodes on its surface and also coupling electrodes capacitively coupled with portions of the interdigitated electrodes on the first element. Circuit means are disclosed connected to the electrodes on the second member for establishing an alternating electrostatic coupling wave between the electrodes on the two elements and for detecting an error signal indicative of the relative displacement between the two elements within a measurement cycle. Electrical connections need only be made to one of the two relatively movable transducer elements. Novel means for the reduction or elimination of un- wanted impedance variations, undesired capacitive coupling and unwanted harmonic coupling wave frequency components are also disclosed.

243903

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