Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

G - Physics

01

L

340/141, 26/201,

G01L 9/12 (2006.01) G01L 13/02 (2006.01)

Patent

CA 1081989

ABSTRACT OF THE DISCLOSURE A capacitive pressure sensor utilizing a sensing diaphragm and having a capacitor plate mounted directly to the diaphragm and movable therewith. The plate and the diaphragm together form a capacitive sensor, and as the diaphragm deflects the capacitance between the plate and the diaphragm changes to provide a measure of the mount of deflection of the diaphragm. The direct mounting of the capacitor plate to the diaphragm avoids many problems which might otherwise occur due to thermal transients and mechanical instabilities in the housing for the sensor. In addition, a greater capacitance change is achieved for a given amount of deflection of the diaphragm.

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