Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

G - Physics

01

L

340/141, 73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01) G01L 13/02 (2006.01)

Patent

CA 1112470

CAPACITIVE PRESSURE SENSOR Abstract of the Disclosure The present invention relates to a capacitive pressure sensor. The sensor has at least one substrate on which a conduit is formed. A diaphragm of conductive material is mounted on the substrate and is deflected by pressure, between the substrate and the diaphragm. The substrate and the diaphragm form at least one pressure chamber into which fluid is fed through the conduit. At least one electrode is provided, made of conductive material, positioned opposite to the diaphragm so that an electrostatic capacity is formed between the diaphragm and the electrode. The diaphragm is made of silicon. The peripheral portion of the silicon diaphragm of conductive material is rigidly secured to the substrate which is of an insulating material. The securing of the peripheral portion of the diaphragm to the substrate is performed by an anodic bonding process.

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