Capacitive pressure sensor

Details Capacitive pressure sensor Capacitive pressure sensor

G - Physics

01

L

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2168226

A capacitive pressure sensor (10) includes a conductive diaphragm (20) positioned between two pneumatically separate chambers (60, 64). The diaphragm is supported at its periphery by a concave base member (30). An electrode assembly (40) establishes a substantially planar conductive surface (42a) opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a single support element (44) secured to, and extending through the base member. A glass dielectric (46) fixes the support element to a collar (48) which may be welded, brazed, or soldered to the base member. The glass dielectric provides both mechanical support and high quality electric insulation between the electrode and the housing. By prefabricating the electrode support element with the collar and securing the collar to the housing after the dielectric has cured, problems associated with thermal expansion are avoided and the dimension of the nominal gap may be precisely controlled at low cost. I

Manomètre capacitif (10) comportant une membrane conductrice (20) située entre deux chambres pneumatiques séparées (60, 64). La membrane repose à sa périphérie sur une base concave (30) tandis qu'une électrode (40) constitue une surface conductrice sensiblement plane (42a) faisant face à une distance nominale à la membrane. L'électrode comprend la susdite surface conductrice et un support unique (44) fixé à la base. Le support est lui-même fixé par un élément diélectrique vitreux à un collier (48) qui peut être soudé ou brasé sur la base. L'élément diélectrique sert de support tout en assurant une isolation électrique de haute qualité entre l'électrode et le boîtier. Si l'on préassemble le support d'électrode et le collier et l'on ne fixe le collier au boîtier qu'après que le diélectrique ait durci, on élimine les problèmes de dilatation, ce qui permet de contrôler avec précision, et à faible coût, l'intervalle nominal séparant l'électrode de la membrane.

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