Capacitive pressure sensor and method of manufacturing same

Details Capacitive pressure sensor and method of manufacturing same Capacitive pressure sensor and method of manufacturing same

G - Physics

01

L

73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2028115

-8- This rugged, temperature-shock-insensitive, and low-cost pressure sensor (1) has a diaphragm (2) and a substrate (3) which are alumina-ceramic parts, preferably with a purity of 96%, are joined together in a defined spaced relationship and parallel to each other by means of an intermediate layer, forming a, preferably closed, chamber, and have flat inner surfaces which are provided with at least one conductive layer for forming at least one capacitor and are electrically connected to the respective rear side of the diaphragm or substrate via through-hole coatings. For the conductive layers (6, 7, 8), the through-hole coatings (12, 13, 14), and the intermediate layer (5), use is made of a conductive paste or a resistive paste with a sheet resistivity not higher than 1 ohm/square, which are applied using silk-screening techniques.

Capteur de pression (1) solide, insensible à la température et aux chocs et à prix modique comprenant un diaphragme (2) et un substrat (3) en céramique d'alumine, de préférence pure à 96 %, joints dans une relation espacée définie et maintenue parallèle l'un par rapport à l'autre par une couche intermédiaire, formant une chambre, de préférence fermée, à surfaces intérieures planes qui sont constituées d'au moins une couche conductrice, formant au moins un condensateur, et qui sont raccordées électriquement au côté arrière respectif du diaphragme ou du substrat par des enrobages de trous débouchants. On utilise une pâte conductrice ou résistive d'une résistance série d'au plus 1ohm/carré, appliquée selon des techniques de sérigraphie, pour les couches conductrices (6, 7, 8), les enrobages des trous débouchants (12, 13, 14) et la couche intermédiaire (5).

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