Capacitive pressure sensor and method of manufacturing same

Details Capacitive pressure sensor and method of manufacturing same Capacitive pressure sensor and method of manufacturing same

G - Physics

01

L

26/112, 73/3

G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01)

Patent

CA 2028835

The capacitive pressure sensor (10) has two disks (11, 12) of alumina which are joined together around the periphery in a defined spaced relationship and parallel to each other, forming a chamber (14). At least one of the two disks (11) is designed as an elastic diaphragm. A pure nickel coating (16, 18) is applied to the surface of each disk by electroless deposition from an aqueous solution, and on the surfaces of the two disks facing each other, capacitor electrodes (17, 20, 21) are formed by patterning the nickel coating. The capacitor electrodes are connected to an electronic circuit disposed outside the chamber (14) by additional nickel coatings which are formed in plated-through holes (30, 31, 32) simultaneously with the deposition of the pure nickel coating.

La présente invention vise un capteur de pression capacitif (10) composé de deux disques (11, 12) d'alumine qui se joignent en périphérie dans une position prédéterminée, parallèles l'un à l'autre, définissant ainsi un logement (14). Au moins un des deux disques (11) joue, de par sa conception, le rôle d'une membrane élastique. Un enduit de nickel pur (16, 18) est appliqué à la surface de chaque disque par dépôt autocatalytique en solution aqueuse; à la surface de ces deux disques montés en vis-à-vis, des armatures (17, 20, 21) sont réalisées en donnant une texture précise à l'enduit de nickel. Les armatures de capacitance sont reliées à un circuit électronique à l'extérieur du logement (14) par le biais de couches additionnelles de nickel appliquées dans des trous métallisés (30, 31, 32) en même temps que l'enduit de nickel pur.

Affiliated with

Also associated with

Rating

Capacitive pressure sensor and method of manufacturing same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive pressure sensor and method of manufacturing same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive pressure sensor and method of manufacturing same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1694253